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Dielectric Films for Advanced Microelectronics
Mikhail Baklanov (Editor), Karen Maex (Editor), Martin Green (Editor)
ISBN: 978-0-470-01360-1
Hardcover
508 pages
April 2007
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Karen Maex, IMEC Fellow, Silicon Process and Device Technology Division, Leuven, Belgium & Professor at Katholieke Universiteit Leuven

Mikhail R. Baklanov, Principal Scientist, Silicon Process and Device Technology Division, IMEC, Leuven, Belgium

IMEC is the largest independent microelectronics R&D centre in Europe, with over 1250 staff. R&D ranges from the design of complex single-chip and single-package systems for telecommunications and multimedia, new process technologies for optoelectronics, photovoltaics, area-array packing, etc.

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