 Surfaces, Interfaces, and Films for Microelectronics
ISBN: 978-0-470-17447-0
Hardcover
515 pages
February 2008
US $125.00
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Preface.
Part I: Fundamentals of Surfaces and Interfaces.
1. Introduction to Surfaces.
2. Structure of Surfaces.
3. Thermodynamics of Surfaces and Interfaces.
4. Surface Roughness.
5. Surface electronic States.
6. Other Surface Probes.
7. Charged Surfaces.
8.Adsorption.
9. Elliposometry and Optical Properties of Surfaces, Interfaces, and Films.
Part II: Microelectronics Applications.
10. Films and Interfaces.
11. Electronic Passivation of Semiconductor-Dielectric Film Interfaces.
12. The Si-SiO2 Interface and Other MOSFET Interfaces.
Index.
