Micro-Manufacturing: Design and Manufacturing of Micro-Products
1 FUNDAMENTALS OF MICRO-MANUFACTURING.
2 MICRO-FABRICATION PROCESSES IN SEMICONDUCTOR INDUSTRY.
3 MODELING AND ANALYSIS AT MICRO-SCALES.
4 METROLOGY, INSPECTION, AND PROCESS CONTROL IN MICRO-SCALES.
5 MICRO-LAYERED MANUFACTURING.
6 MICRO-LASER PROCESSING.
7 POLYMER MICRO-MOLDING/FORMING PROCESSES.
8 MECHANICAL MICRO-MACHINING.
10 MICRO-ELECTRO DISCHARGE MACHINING (μEDM).
11 METAL INJECTION MOLDING AT MICRO-SCALES (μMIM).
Tuğrul Özel, PhD, is the Director of Manufacturing Automation Research Laboratory and Associate Professor in the Department of Industrial and Systems Engineering at Rutgers University in New Jersey. His research interests include manufacturing processes and automated systems, computational modeling of machining processes, laser-based micro/nano processing, and design and manufacturing of micro-products.