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Cover image for product 047084308X
RF MEMS and Their Applications
ISBN: 978-0-470-84308-6
Hardcover
406 pages
December 2002
US $170.00 Add to Cart

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Other Available Formats: Adobe E-Book
  • Description
  • Table of Contents
Preface.

Microelectromechanical Systems (MEMS) and Radio Frequency MEMS.

MEMS Materials and Fabrication Techniques.

RF MEMS Switches and Micro Relays.

MEMS Inductors and Capacitors.

Micromachined RF Filters.

Micromachined  Phase Shifters.

Micromachined Transmission Lines and Components.

Micromachined Antennae.

Integration and Packaging for RF MEMS Devices.

Index.

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