![]() RF MEMS and Their Applications
ISBN: 978-0-470-84308-6
Hardcover
406 pages
December 2002
US $170.00
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Preface.
Microelectromechanical Systems (MEMS) and Radio Frequency MEMS.
MEMS Materials and Fabrication Techniques.
RF MEMS Switches and Micro Relays.
MEMS Inductors and Capacitors.
Micromachined RF Filters.
Micromachined Phase Shifters.
Micromachined Transmission Lines and Components.
Micromachined Antennae.
Integration and Packaging for RF MEMS Devices.
Index.

