 Semiconductor Technology: Processing and Novel Fabrication Techniques
ISBN: 978-0-471-12792-5
Hardcover
264 pages
September 1997
US $135.50
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About the editors
Mikhail E. Levinshtein is a professor at the Ioffe Institute of the Russian Academy of Science.
Michael S. Shur teaches in the Electrical, Computer and Systems Engineering Department of Rensselaer Polytechnic Institute.
Mikhail E. Levinshtein is a professor at the Ioffe Institute of the Russian Academy of Science.
Michael S. Shur teaches in the Electrical, Computer and Systems Engineering Department of Rensselaer Polytechnic Institute.
