 Semiconductor Technology: Processing and Novel Fabrication Techniques
ISBN: 978-0-471-12792-5
Hardcover
264 pages
September 1997
US $135.50
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Introduction to Semiconductor Technology (E. Guk & N. Shmidt).
Transmutation Doping of Semiconductors by Charged Particles (V. Kozlovskii & L. Zakharenkov).
Polymer Diffusants in Semiconductor Technology (E. Guk, et al.).
Rare-Earth Elements in the Technology of III-V Compounds (L. Zakharenkov, et al.).
Intrinsic Point Defect Engineering in Silicon High-Voltage Power Device Technology (N. Sobolev).
Isovalent Impurity Doping of Direct-Gap III-V Semiconductor Layers (V. Chaldyshev & S. Novikov).
Surface Passivation of III-V Compounds by Inorganic Dielectrics and Polyimides (A. Gorelenok, et al.).
Precision Profiling of Semiconductor Surfaces by Photochemical Etching (D. Goryachev, et al.).
Index.
Transmutation Doping of Semiconductors by Charged Particles (V. Kozlovskii & L. Zakharenkov).
Polymer Diffusants in Semiconductor Technology (E. Guk, et al.).
Rare-Earth Elements in the Technology of III-V Compounds (L. Zakharenkov, et al.).
Intrinsic Point Defect Engineering in Silicon High-Voltage Power Device Technology (N. Sobolev).
Isovalent Impurity Doping of Direct-Gap III-V Semiconductor Layers (V. Chaldyshev & S. Novikov).
Surface Passivation of III-V Compounds by Inorganic Dielectrics and Polyimides (A. Gorelenok, et al.).
Precision Profiling of Semiconductor Surfaces by Photochemical Etching (D. Goryachev, et al.).
Index.
