![]() Semiconductor Technology: Processing and Novel Fabrication Techniques
ISBN: 978-0-471-12792-5
Hardcover
264 pages
September 1997
US $135.50
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The product of decades of Russian research in semiconductor technology, this invaluable book offers Western researchers and engineers a wide range of new techniques, recipes, and characterization methods that provide simpler, cheaper, and more effective solutions to problems in semiconductor processing and fabrication. Many of these approaches appear here for the first time in Western technological literature.

