 RF MEMS: Theory, Design, and Technology
ISBN: 978-0-471-20169-4
Hardcover
512 pages
February 2003
US $135.00
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Chapter 1- Introduction: RF MEMS for Microwave Applications.
Chapter 2- Mechanical Modeling of MEMS Devices: Static Analysis.
Chapter 3- Mechanical Modeling of MEMS Devices: Dynamic Analysis.
Chapter 4- Electromagnetic Modeling of MEMS Switches.
Chapter 5- MEMS Switch Library.
Chapter 6-MEMS Switch Fabrication and Packaging.
Chapter 7-MEMS Switch Reliability and Power Handling.
Chapter 8- Design of MEMS Switch Circuits.
Chapter 9-MEMS Phase Shifters.
Chapter 10- Distributed MEMS Phase Shifters and Switches.
Chapter 11- MEMS Varactors and Tunable Oscillators.
Chapter 12- Micro machined Inductors.
Chapter 13- Reconfigurable MEMS Networks, Filters, Antennas, and Subsystem.
Chapter 14- Phase Noise Analysis of MEMS Circuits, Phase Shifters, and Oscillators.
Chapter 15- Future Work in RF MEMS.
Appendix A: Detailed Analysis and Measurements of Intermodulation Distortion and Power Handling in RF MEMS Switches, Varactors, and Tunable Filters.
Appendix B: Mechanical, Electrical, and Thermal Properties of RF MEMS Materials.
Index.
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