RF MEMS: Theory, Design, and Technology
Chapter 1- Introduction: RF MEMS for Microwave Applications.
Chapter 2- Mechanical Modeling of MEMS Devices: Static Analysis.
Chapter 3- Mechanical Modeling of MEMS Devices: Dynamic Analysis.
Chapter 4- Electromagnetic Modeling of MEMS Switches.
Chapter 5- MEMS Switch Library.
Chapter 6-MEMS Switch Fabrication and Packaging.
Chapter 7-MEMS Switch Reliability and Power Handling.
Chapter 8- Design of MEMS Switch Circuits.
Chapter 9-MEMS Phase Shifters.
Chapter 10- Distributed MEMS Phase Shifters and Switches.
Chapter 11- MEMS Varactors and Tunable Oscillators.
Chapter 12- Micro machined Inductors.
Chapter 13- Reconfigurable MEMS Networks, Filters, Antennas, and Subsystem.
Chapter 14- Phase Noise Analysis of MEMS Circuits, Phase Shifters, and Oscillators.
Chapter 15- Future Work in RF MEMS.
Appendix A: Detailed Analysis and Measurements of Intermodulation Distortion and Power Handling in RF MEMS Switches, Varactors, and Tunable Filters.
Appendix B: Mechanical, Electrical, and Thermal Properties of RF MEMS Materials.
"It provides the most comprehensive survey of this new and important technology.” (Microwave Journal, January 2004)
"...an invaluable addition to the research library, and highly recommended to all interested in this fascinating technology." (Microwaves & RF, June 2003)