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Nanotechnology and MEMS
 Future Trends in Microelectronics: The Nano Millennium
ISBN: 978-0-471-21247-8
Hardcover
408 pages
September 2002, Wiley-IEEE Press
US $84.95
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"…well-organized and readable and includes sections by knowledgeable specialists in their fields. It will spur you to think and will help you realize how and why the technologies you are using may differ greatly in five or 10 years.” (EDN.com)
"...lively and thought-provoking book..." (Choice, Vol. 40, No. 6 February 2003)
