 Physical Vapor Deposition of Thin Films
ISBN: 978-0-471-33001-1
Hardcover
336 pages
February 2000
US $145.00
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Introduction to Physical Vapor Deposition.
The Kinetic Theory of Gases.
Adsorption and Condensation.
Principles of High Vacuum.
Evaporation Sources.
Principles of Sputtering Discharges.
Sputtering.
Film Deposition.
Index.
The Kinetic Theory of Gases.
Adsorption and Condensation.
Principles of High Vacuum.
Evaporation Sources.
Principles of Sputtering Discharges.
Sputtering.
Film Deposition.
Index.
