  ULSI Semiconductor Technology Atlas
ISBN: 978-0-471-45772-5
Hardcover
666 pages
October 2003
US $204.00
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"...provides a historical introduction to the technology as well as coverage of the evolution of basic ULSI process problems and issue." (IEEE Solid-State Circuits Society Newsletter, January 2004)
"…strongly recommended…" (E-Streams, Vol. 7, No. 4)
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