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RF MEMS: Theory, Design, and Technology

ISBN: 978-0-471-46288-0
512 pages
February 2004
RF MEMS: Theory, Design, and Technology (0471462888) cover image


Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.
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Table of Contents


Chapter 1- Introduction: RF MEMS for Microwave Applications.

Chapter 2- Mechanical Modeling of MEMS Devices: Static Analysis.

Chapter 3- Mechanical Modeling of MEMS Devices: Dynamic Analysis.

Chapter 4- Electromagnetic Modeling of MEMS Switches.

Chapter 5- MEMS Switch Library.

Chapter 6-MEMS Switch Fabrication and Packaging.

Chapter 7-MEMS Switch Reliability and Power Handling.

Chapter 8- Design of MEMS Switch Circuits.

Chapter 9-MEMS Phase Shifters.

Chapter 10- Distributed MEMS Phase Shifters and Switches.

Chapter 11- MEMS Varactors and Tunable Oscillators.

Chapter 12- Micro machined Inductors.

Chapter 13- Reconfigurable MEMS Networks, Filters, Antennas, and Subsystem.

Chapter 14- Phase Noise Analysis of MEMS Circuits, Phase Shifters, and Oscillators.

Chapter 15- Future Work in RF MEMS.

Appendix A: Detailed Analysis and Measurements of  Intermodulation Distortion and Power Handling in RF MEMS Switches, Varactors, and Tunable Filters.

Appendix B: Mechanical, Electrical, and Thermal Properties of RF MEMS Materials.


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Author Information

GABRIEL M. REBEIZ received his PhD from the California Institute of Technology. He was the recipient of the National Science Foundation Presidential Young Investigator Award, and in 2000 was the corecipient of the IEEE Microwave Prize. A Fellow of the IEEE and a consultant to Rockwell, Samsung, Intel, Standard MEMS, and Agilent, he has published extensively in the field of microwave technology and in the area of RF MEMS. He was at the University of Michigan, Ann Arbor, and is now a Professor of Electrical and Computer Engineering at the University of California, San Diego.
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"...an excellent book for graduate students or practicing engineers in the field of RF microwave technology who need to learn about the latest developments in the RF MEMS world." (IEEE Electrical Insulation Magazine, November/December 2004)

"It provides the most comprehensive survey of this new and important technology.” (Microwave Journal, January 2004)

"...an invaluable addition to the research library, and highly recommended to all interested in this fascinating technology." (Microwaves & RF, June 2003)

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