 Semiconductor Device and Failure Analysis : Using Photon Emission Microscopy
ISBN: 978-0-471-49240-5
Hardcover
288 pages
January 2001
US $240.00
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"This reference details the principles of design, calibration, and use of photon emission microscopy (PEM) as a fault localization technique used for analyzing device reliability and failure." (SciTech Book News Vol. 25, No. 2 June 2001)
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