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Fundamentals of Semiconductor Manufacturing and Process Control
Gary S. May, Costas J. Spanos
ISBN: 978-0-471-78406-7
Hardcover
488 pages
May 2006, Wiley-IEEE Press
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"…offers insight into the IC manufacturing process…[to] the practicing engineer or interested professional." (IEEE Circuits & Devices Magazine, November/December 2006)

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