Low-Temperature Oxidation: The Role of Vitreous OxidesISBN: 978-0-471-87448-5
Hardcover
257 pages
April 1986
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Rate Expressions for Oxide Growth.
Structure of Vitreous Oxides.
Charge Transport in Noncrystalline Oxides.
Initial Oxide Formation.
Experimental Evidence Concerning Initial Oxide Formation.
The Role of Interfaces.
Formation of a Stable Oxide Film.
Continued Growth of Three-Dimensional Oxide.
Results and Conclusions.
Oxidation of Silicon.
Index.
Structure of Vitreous Oxides.
Charge Transport in Noncrystalline Oxides.
Initial Oxide Formation.
Experimental Evidence Concerning Initial Oxide Formation.
The Role of Interfaces.
Formation of a Stable Oxide Film.
Continued Growth of Three-Dimensional Oxide.
Results and Conclusions.
Oxidation of Silicon.
Index.
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