 Cold Plasma Materials Fabrication: From Fundamentals to Applications
ISBN: 978-0-7803-4714-4
Paperback
272 pages
April 1994, Wiley-IEEE Press
US $132.95
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Preface.
List of Symbols.
Fundamentals of Plasma.
Cold Plasma Generation.
Plasma Chemistry.
Plasma Reactors.
Plasma Diagnostics.
Cold Plasma Processes for Surface Modification.
Deposition of Coatings by PECVD.
Plasma Assisted Etching.
Index.
About the Author.
List of Symbols.
Fundamentals of Plasma.
Cold Plasma Generation.
Plasma Chemistry.
Plasma Reactors.
Plasma Diagnostics.
Cold Plasma Processes for Surface Modification.
Deposition of Coatings by PECVD.
Plasma Assisted Etching.
Index.
About the Author.
