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E-book
Micro-Manufacturing: Design and Manufacturing of Micro-ProductsISBN: 978-1-118-01056-3
E-book
375 pages
May 2011
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Other Available Formats: Hardcover
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FOREWORD.
CONTRIBUTORS.
1 FUNDAMENTALS OF MICRO-MANUFACTURING.
2 MICRO-FABRICATION PROCESSES IN SEMICONDUCTOR INDUSTRY.
3 MODELING AND ANALYSIS AT MICRO-SCALES.
4 METROLOGY, INSPECTION, AND PROCESS CONTROL IN MICRO-SCALES.
5 MICRO-LAYERED MANUFACTURING.
6 MICRO-LASER PROCESSING.
7 POLYMER MICRO-MOLDING/FORMING PROCESSES.
8 MECHANICAL MICRO-MACHINING.
9 MICRO-FORMING.
10 MICRO-ELECTRO DISCHARGE MACHINING (μEDM).
11 METAL INJECTION MOLDING AT MICRO-SCALES (μMIM).
INDEX.
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