LithographyISBN: 978-1-84821-202-2
Hardcover
320 pages
December 2010, Wiley-ISTE
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Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
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Lithography (US $155.00)
-and- Network Coding (US $125.00)
Total List Price: US $280.00
Discounted Price: US $210.00 (Save: US $70.00)
