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Silicon Technologies: Ion Implantation and Thermal Treatment

Annie Baudrant (Editor)
ISBN: 978-1-84821-231-2
Hardcover
368 pages
July 2011, Wiley-ISTE
US $147.00 Add to Cart

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Silicon Technologies: Ion Implantation and Thermal Treatment (1848212313) cover image
Other Available Formats: E-book

  • Description
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.

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Silicon Technologies: Ion Implantation and Thermal Treatment (US $147.00)

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