 Microsystem Technology
ISBN: 978-3-527-29634-7
Hardcover
512 pages
March 2001
US $285.00
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This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
