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Semiconductors for Micro- and Nanotechnology: An Introduction for Engineers

ISBN: 978-3-527-30257-4
324 pages
July 2002
Semiconductors for Micro- and Nanotechnology: An Introduction for Engineers (3527302573) cover image
Semiconductors play a major role in modern microtechnology, especially in microelectronics. Since the dimensions of new microelectronic components, e.g. computer chips, now reach nanometer size, semiconductor research moves from microtechnology to nanotechnology.
An understanding of the semiconductor physics involved in this new technology is of great importance for every student in engineering, especially electrical engineering, microsystem technology and physics.
This textbook emphasizes a system-oriented view of semiconductor physics for applications in microsystem technology. While existing books only cover electronic device physics and are mainly written for physics students, this text gives a more hands-on approach to semiconductor physics and so avoids overloading engineering students with mathematical formulas not essential for their studies.
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Introduction
The Crystal Lattice System
The Electronic System
The Electromagnetic System
Statistics
Interacting Subsystems
Classical and Semi-Classical Transport Theory
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