1. Introduction.

1.1 Arrhenius Plot.

1.2 The Relationship between Kinetics and Thermodynamics.

1.3 The Boltzmann Distribution.

1.4 Kinetic Theory of Gases.

1.5 Collisions.

2. Diffusion in Fluids.

2.1 Diffusion in a Gas.

2.2 Diffusion in Liquids.

3. Diffusion in Amorphous Materials.

3.1 Amorphous Materials.

3.2 Network Glass Formers.

3.3 The Glass Transition.

3.4 The Free-Volume Model.

3.5 Fictive Temperature.

3.6 Diffusion in Polymers.

3.7 The Stokes–Einstein Relationship.

4. Diffusion in Crystals.

4.1 Diffusion in a Crystal.

4.2 Diffusion Mechanisms in Crystals.

4.4 Equilibrium Concentration of Vacancies.

4.5 Simmons and Balluffi Experiment.

4.6 Ionic and Covalent Crystals.

4.7 Stoichiometry.

4.8 Measurement of Diffusion Coefficients.

4.9 Surface Diffusion.

4.10 Diffusion in Grain Boundaries.

4.11 Kirkendall Effect.

4.12 Whisker Growth.

4.13 Electromigration.

5. Diffusion in Semiconductors.

5.1 Introduction.

5.2.1 Vacancy Diffusion in Silicon.

5.2.2 Diffusion of Phosphorus in Silicon.

5.2.3 Diffusion of Arsenic in Silicon.

5.2.4 Diffusion of Boron in Silicon.

5.3 Diffusion of Zinc in GaAs.

5.4 Recombination-enhanced Diffusion.

5.5 Doping of Semiconductors.

5.6 Point-Defect Generation in Silicon during Crystal Growth.

5.7 Migration of Interstitials (and Liquid Droplets) in a Temperature Gradient.

5.8 Oxygen in Silicon.

5.9 Gettering.

5.10 Solid-State Doping.

6. Ion Implantation.

6.1 Introduction.

6.2 Ion Interactions.

6.3 Implantation Damage.

6.4 Rutherford Backscattering.

6.5 Channeling.

6.6 Silicon-on-Insulator.

7. Mathematics of Diffusion.

7.1 Random Walk.

7.2 The Diffusion Equation.

7.3 Solutions to the Diffusion Equation.

7.4 Numerical Methods.

7.5 Boltzmann–Matano Analysis.

8. Stefan Problems.

8.1 Steady-State Solutions to the Diffusion Equation.

8.2 Deal–Grove Analysis.

8.3 Diffusion-Controlled Growth of a Spherical Precipitate.

8.4 Diffusion-Limited Growth in Cylindrical Coordinates.

9. Phase Transformations.

9.1 Transformation-Rate-Limited Growth.

9.2 Diffusion-Limited Growth.

9.3 Thermally Limited Growth.

9.4 Casting of Metals.

9.5 Operating Point.

10. Crystal Growth Methods.

10.1 Melt Growth.

10.2 Solution Growth.

10.3 Vapor-Phase Growth.

10.4 Stoichiometry.

11. Segregation.

11.1 Segregation during a Phase Change.

11.2 Lever Rule.

11.3 Scheil Equation.

11.4 Zone Refining.

11.5 Diffusion at a Moving Interface.

11.6 Segregation in Three Dimensions.

11.7 Burton, Primm and Schlicter Analysis.

12. Interface Instabilities.

12.1 Constitutional Supercooling.

12.2 Mullins and Sekerka Linear Instability Analysis.

12.3 Anisotropic Interface Kinetics.

13. Chemical Reaction Rate Theory.

13.1 The Equilibrium Constant.

13.2 Reaction Rate Theory.

13.3 Reaction Rate Constant.

13.4 Transition State Theory.

13.5 Experimental Determination of the Order of a Reaction.

13.6 Net Rate of Reaction.

13.7 Catalysis.

13.8 Quasi-Equilibrium Model for the Rate of a First-Order phase Change.

14. Phase Equilibria.

14.1 First-Order Phase Changes.

14.2 Second-Order Phase Changes.

14.3 Critical Point between Liquid and Vapor.

15. Nucleation.

15.1 Homogeneous Nucleation.

15.2 Heterogeneous Nucleation.

15.3 Johnson–Mehl–Avrami Equation.

16. Surface Layers.

16.1.1 Langmuir Adsorption.

16.1.2 CVD Growth by a Surface-Decomposition Reaction.

16.1.3 Langmuir–Hinshelwood Reaction.

16.2 Surface Nucleation.

16.3 Thin Films.

16.4 Surface Reconstruction.

16.5 Amorphous Deposits.

16.6 Surface Modification.

16.7 Fractal Deposits.

16.8 Strain Energy and Misfit Dislocations.

16.9 Strained-Layer Growth.

17. Thin-Film Deposition.

17.1 Liquid Phase Epitaxy.

17.2 Growth Configurations for LPE.

17.3 Chemical Vapor Deposition.

17.4 Metal-Organic Chemical Vapor Deposition.

17.5 Physical Vapor Deposition.

17.6 Sputter Deposition.

17.7 Metallization.

17.8 Laser Ablation.

17.9 Molecular Beam Epitaxy.

17.10 Atomic Layer Epitaxy.

18. Plasmas.

18.1 Direct Current (DC) Plasmas.

18.2 Radio-Frequency Plasmas.

18.3 Plasma Etching.

18.4 Plasma Reactors.

18.5 Magnetron Sputtering.

18.6 Electron Cyclotron Resonance.

18.7 Ion Milling.

19. Rapid Thermal Processing.

19.1 Rapid Thermal Processing.

19.2 Rapid Thermal Processing Equipment.

19.3 Radiative Heating.

19.4 Temperature Measurement.

19.5 Thermal Stress.

19.6 Laser Heating.

20. Kinetics of First-Order Phase Transformations.

20.1 General Considerations.

20.2 The Macroscopic Shape of Crystals.

20.3 General Equation for the Growth Rate of Crystals.

20.4 Kinetic Driving Force.

20.5 Vapor-Phase Growth.

20.6 Melt Growth.

20.7 Molecular Dynamics Studies of Melt Crystallization Kinetics.

20.8 The Kossel–Stranski Model.

20.9 Nucleation of Layers.

20.10 Growth on Screw Dislocations.

20.11 The Fluctuation Dissipation Theorem.

21. The Surface-Roughening Transition.

21.1 Surface Roughness.

21.2 The Ising Model.

21.3 Cooperative Processes.

21.4 Monte Carlo Simulations of Crystallization.

21.5 Equilibrium Surface Structure.

21.6 Computer Simulations.

21.7 Growth Morphologies.

21.8 Kinetic Roughening.

21.9 Polymer Crystallization.

22. Alloys: Thermodynamics and Kinetics.

22.1 Crystallization of Alloys.

22.2 Phase Equilibria.

22.3 Regular Solution Model.

22.4 Near-Equilibrium Conditions.

22.5 Phase Diagrams.

22.6 The DLP Model.

23. Phase Separation.

23.1 Ordering versus Phase Separation.

23.2 Phase Separation.

23.3 Analytical Model for Spinodal Decomposition.

23.4 Microstructure Resulting from Phase Separation.

24. Non-Equilibrium Crystallization of Alloys.

24.1 Non-Equilibrium Crystallization.

24.2 Experiment.

24.3 Computer Modeling.

24.4 Analytical Model.

24.5 Comparison with Experiment.

24.6 Crystallization of Glasses.

25. Coarsening, Ripening.

25.1 Coarsening.

25.2 Free Energy of a Small Particle.

25.3 Coarsening in a Solution.

25.4 Coarsening of Dendritic Structures.

25.5 Sintering.

25.6 Bubbles.

25.7 Grain Boundaries.

25.8 Scratch Smoothing.

26. Dendrites.

26.1 Dendritic Growth.

26.2 Conditions for Dendritic Growth.

26.3 Simple Dendrite Model.

26.4 Phase Field Modeling.

26.5 Faceted Growth.

26.6 Distribution Coefficient.

27. Eutectics.

27.1 Eutectic Phase Diagram.

27.2 Classes of Eutectic Microstructures.

27.3 Analysis of Lamellar Eutectics.

27.4 Off-Composition Eutectics.

27.5 Coupled Growth.

27.6 Third-Component Elements.

28. Castings.

28.1 Grain Structure of Castings.

28.2 Dendrite Remelting.

Subject Index by Page.

Subject Index by Chapter Sections.