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Enabling Technologies for MEMS and Nanodevices: Advanced Micro and Nanosystems

Henry Baltes (Editor), Oliver Brand (Editor), Gary K. Fedder (Editor), Christofer Hierold (Editor), Jan G. Korvink (Editor), Osamu Tabata (Editor)
ISBN: 978-3-527-30746-3
439 pages
August 2004
Enabling Technologies for MEMS and Nanodevices: Advanced Micro and Nanosystems (352730746X) cover image


This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon
processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass
data storage and electrochemical imaging by means of scanning micro- and nanoprobes.

The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.
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Table of Contents

M3: The Third Dimension of Silicon
Trends in MEMS Commercialization
Capacitive Interfaces for MEMS
Packaging of Advanced Micro- and Nanosystems
High Frequency Integrated Micro-electromechanical Resonators and Filters
MEMS in Mass Storage Systems
Scanning Micro- and Nanoprobes for Electrochemical Imaging
Nanofluidic Simulations
Nanofluidics -
Structures and Devices
Carbon Nanotubes and Sensors: a Review
CMOS-based DNA Sensor Arrays
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"Overall, the book gives good insight into very recent technologies, developments, and practical applications in the MEMS field. I would recommend this book as supplementary reading for graduate students, but not as a class text since the book assumes the reader already has fundamental knowledge in this research field. The book is also a very useful source for professionals in related areas of materials science and mechanical and chemical engineering who want to become aware of emerging MEMS technologies."
Advanced Materials

"... an excellent book that gives a good overview and discussion of sensors and devices commonly found in the field of MEMS as well as more advanced devices..."
MRS Bulletin
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