 CMOS-MEMS: Advanced Micro and Nanosystems, Volume 2
ISBN: 978-3-527-31080-7
Hardcover
608 pages
May 2005
US $290.00
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Foreword.
List of Contributors.
1 Fabrication Technology (O. Brand).
2 Material Characterization (J. O. Paul and P. Ruther).
3 Monolithically Integrated Inertial Sensors (G. K. Fedder, J. Chae, H. Kulah, K. Najafi, T. Denison, J. Kuang, and S. Lewis).
4 CMOS–MEMS Acoustic Devices (J. J. Neumann and K. J. Gabriel).
5 RF CMOS MEMS (T. Mukherjee and G. K. Fedder).
6 CMOS-based Pressure Sensors (H.-J. Timme).
7 CMOS-based Chemical Sensors (A. Hierlemann).
8 Biometric Capacitive CMOS Fingerprint Sensor Systems (C. Hierold, G. Hribernig, and T. Scheiter).
9 CMOS-based Biochemical Sensing Systems (J. Lichtenberg, H. Baltes).
10 CMOS-based Thermal Sensors (T. Akin).
11 Circuit and System Integration (C. Hagleitner and K.-U. Kirstein).
Subject Index.
