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Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

Norbert Kockmann (Editor), Oliver Brand (Series Editor), Gary K. Fedder (Series Editor), Christofer Hierold (Series Editor), Jan G. Korvink (Series Editor), Osamu Tabata (Series Editor)
ISBN: 978-3-527-31246-7
529 pages
March 2006
Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications (3527312463) cover image


Advanced Micro & Nanosystems (AMN) provides cutting-edge reviews and detailed case studies by top authors from science and industry, covering technologies, devices and advanced systems from the micro and nano worlds, which together have an immense innovative application potential that opens up with control of shape and function from the atomic level right up to the visible world without any technological gaps.
In this topical volume, authors from leading industrial players and research institutions present a concise and didactical introduction to Micro Process Engineering, the combination of microtechnology and process engineering into a most promising and powerful tool for revolutionizing chemical processes and industrial mass production of bulk materials, fine chemicals, pharmaceuticals and many other products.
The book takes the readers from the fundamentals of engineering methods, transport processes, and fluid dynamics to device conception, simulation and modelling, control interfaces and issues of modularity and compatibility. Fabrication strategies and techniques are examined next, focused on the fabrication of suitable microcomponents from various materials such as metals, polymers, silicon, ceramics and glass. The book concludes with actual applications and operational aspects of micro process systems, giving broad coverage to industrial efforts in America, Europe and Asia as well as laboratory equipment and education.
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Table of Contents

I. Fundamentals and Engineering
Chemical Engineering Methods
Fluid Dynamics in Channels Below 1mm Hydraulic Diameter
Transport Processes, Thermodynamics, Heat Exchange
Multiphase Flow, Surface and Interface Effects
Chemical reactions in Continuous Flow in Microstructures, Modelling
II. Device Conception and Simulation
General Design Procedure of Microfluidic and Microchemical Devices
Device Microarchitecture, Internal Numbering-up, Fluidic Interfaces, Simulation
System Integration, Interfaces, Equipment Assembly
Integration of Sensors, Control/Sensory Interfaces, Modularity, Compatibility
III. Fabrication Strategies and Techniques
Microfabrication Methods
Choice of Material
Component Recycling and Environmental Considerations
Assembly Strategies, Packaging, Numbering-Up
Prototyping, Tooling, Microcomponent Serial Production, Device Characterization and Start-up
IV. Industrial Application and Operational Issues
Process and Plant Design
Operation/Process Control, Partial Load Operation, Fouling/Blocking
Industrial Production, Laboratory Application, Validation, Educational Devices
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Author Information

((For series editors (Baltes, Brand, Fedder, Hierold, Korvink, Tabata) see www.amn.wiley-vch.de))

Dr.-Ing. Norbert Kockmann is scientific researcher at the chair of microsystem construction of the Institute of Microsystem Technology (IMTEK) of Freiburg University, Germany, since 2001. He began his studies of aerospace engineering in 1985 at the Technical University of Munich. After completing his diploma, he joined the production technology department at Bremen University in 1991 to obtain his Ph.D. in technical thermodynamics, heat and mass transfer.
In 1997, he joined the Messer Griesheim company as a trainee and went on to become project leader of a syngas plant for the production of carbon monoxide.
His research interests include the construction and manufacture of components for microsystems as well as the fundamental processes in microsystems.
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