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KNOWLEDGE FOR GENERATIONS

WILEY - KNOWLEDGE FOR GENERATIONS

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Reliability of MEMS: Testing of Materials and Devices
Oliver Brand (Series Editor), Gary K. Fedder (Series Editor), Christofer Hierold (Series Editor), Jan G. Korvink (Series Editor), Osamu Tabata (Editor), Toshiyuki Tsuchiya (Editor)
ISBN: 978-3-527-31494-2
Hardcover
324 pages
February 2008
US $230.00 Add to Cart

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This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.

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