 Microsystem Engineering of Lab-on-a-Chip Devices
ISBN: 978-3-527-31942-8
Hardcover
297 pages
June 2008
US $140.00
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1. Introduction (Pieter Telleman).
1.1. Learning from the Experiences of Microelectronics.
1.2. The Advantages of Miniaturizing Systems for Chemical Analysis.
1.3. From Concept to µTAS.
1.4. References.
2. Clean Rooms (Daria Petersen and Pieter Telleman).
3. Microfluidics - Theoretical Aspects (Jörg P. Kutter and Henning Klank).
3.1. Fluids and Flows.
3.2. Transport Processes.
3.3. System Design.
3.4. An Application: Biological Fluids,.
3.5. References.
4. Microfluidics - Components (Jörg P. Kutter, Klaus Bo Mogensen, Henning Klank, and Oliver Geschke).
4.1. Valves and Pumps.
4.2. Injecting, Dosing, and Metering.
4.3. Temperature Measurement in Microfluidic Systems.
4.4. Optical Sensors.
4.5. Electrochemical Sensors.
4.6. References.
5. Simulations in Microfluidics (Goran Goranovic and Henrick Bruus).
5.1. Physical Aspects and Design.
5.2. Choosing Software and Hardware.
5.3. Important Numerical Settings.
5.4. Errors and Uncertainties.
5.5. Interpretation and Evaluation of Simulations.
5.6. Example Simulations.
5.7. References.
6. Silicon and Cleanroom Processing (Anders Michael Jorgensen and Klaus Bo Mogensen).
6.1. Substrate Fabrication.
6.2. Optical Lithography.
6.3. Deposition.
6.4. Etching.
6.5. Dry Etching.
6.6. Heat Treatment.
6.7. References.
7. Glass Micromachining (Daria Petersen, Klaus Bo Mogensen, and Henning Klank).
7.1. Wet Chemical Etching.
7.2. Reactive Ion Etching (RIE) of Glass.
7.3. Laser Patterning.
7.4. Powder Blasting.
7.5. Glass Bonding.
7.6. A Microfabrication Example.
7.7. References.
8. Polymer Micromachining (Oliver Geschke, Henning Klank, and Klaus Bo Mogensen.
8.1. Hot Embossing.
8.2. Injection Molding.
8.3. Casting.
8.4. Laser Micromachining.
8.5. Milling.
8.6. X-ray and Ultraviolet Polymer Lithography.
8.7. Sealing of Polymer Microstructures.
8.8. Adding Functionalities.
8.9 Examples of Polymer Microstructures.
8.10. References.
9. Packaging of microfluidic Systems (Gerardo Perozziello).
9.1. Levels of packaging.
9.2. Factors influencing the packaging design and reliability.
9.3. Materials.
9.4. Interconnections.
9.5. References.
10. Determination of Topography (Henning Klank).
10.1. Topography - General Discussion.
10.2. Importance and Relevance of Topography.
10.3. Topographical Determination Considerations.
10.4. Topographical Characterization Methods and Instruments.
10.5. Topographical Examination of a Typical Sample.
10.8 References.
11. Analytical Chemistry on Microsystems (Jörg Kutter and Oliver Geschke).
11.1. Sensors and Sensor Systems.
11.2. Biosensors.
11.3. Flow Injection Analysis.
11.4. Separation Techniques.
11.5. Other Analytical Techniques.
11.6. References.
Subject Index.
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