Handbook of Optical Systems, Volume 5, Metrology of Optical Components and SystemsISBN: 978-3-527-40381-3
Hardcover
1004 pages
May 2012
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Preface XIX
Introduction XXI
46 Interferometry 1
46.1 Introduction 3
46.2 Basic Principles of Interference 4
46.3 Interferometers 4446.4 Interferometer Designs 81
46.5 Detection Techniques and Algorithms 9546.6 Calibration Techniques 120
46.7 Dynamic Range 14046.8 Accuracy and Error Sources 148
46.9 Literature 17547 Non-interferometric Wavefront Sensing 181
47.1 Introduction 183
47.2 Hartmann–Shack Sensor 183
47.3 Hartmann Sensor 20847.4 Phase Space Analyzer 219
47.5 Point Image Filtering Techniques 23047.6 Other Wavefront Sensor Concepts 239
47.7 Point Spread Function Retrieval 24947.8 Calculation of Wavefront and Zernike Coefficients 283
47.9 Literature 29748 Radiometry 303
48.1 Introduction 304
48.2 Basic Principles of Radiometry 305
48.3 Monochromators 34148.4 Spectrometers 402
48.5 Literature 42749 Image Analysis 431
49.1 Introduction 432
49.2 Basic Principles of Image Analysis 432
49.3 Star Test, Slit Test 43649.4 Test Targets, Visual Inspection 450
49.5 Distortion Metrology 452
49.6 Deflectometers 46449.7 Pattern and Fringe Projectors 471
49.8 Literature 48550 Distance and Angle Metrology 489
50.1 Introduction 490
50.2 Long-range Displacement Metrology 490
50.3 Short-range Displacement and Thickness Metrology 51550.4 Angle and Tilt Metrology 524
50.5 Combined Distance and Angle Metrology 54050.6 Optical Profile Metrology 548
50.7 Literature 55551 Polarimetry 559
51.1 Introduction 560
51.2 Basic principles of Polarimetry 561
51.3 Polarizing Elements 57251.4 Polarimeters 597
51.5 Calibration Techniques 63351.6 Accuracy and Error Sources 635
51.7 Literature 641
52 Testing the Quality of Optical Materials 643
52.1 Specifications 644
52.2 Refractive Index 644
52.3 Transmittance 65152.4 Inhomogeneity and Striae 655
52.5 Birefringence 66452.6 Bubbles and Inclusions 673
52.7 Literature 67753 Testing the Geometry of Optical Components 679
53.1 Specifications 680
53.2 Radius of Curvature 681
53.3 Central Thickness 68953.4 Surface Form and Figure Irrigularities 694
53.5 Centering 76053.6 Diameter and Chamfer 776
53.7 Literature 77954 Testing Texture and Imperfections of Optical Surfaces 785
54.1 Specifications 786
54.2 Surface Texture 786
54.3 Surface Imperfections 82354.4 Literature 836
55 Testing the Quality of Coatings 839
55.1 Introduction 840
55.2 Specifications 844
55.3 Model Simulation 847
55.4 Coating Metrology 85855.5 Literature 878
56 System Testing 881
56.1 Introduction 883
56.2 Basic Parameters of Optical Systems 88756.3 Measurement of Image Quality 912
56.4 Measurement of the Transfer Function 93056.5 Miscellaneous System Properties 945
56.6 Literature 960Index 967
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