 Plasma-Aided Nanofabrication
ISBN: 978-3-527-40633-3
Hardcover
315 pages
September 2007
US $155.00
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Preface.
1. Introduction.
2. Generation of Highly Uniform, High-density Inductively Coupled Plasma.
3. Plasma Sources: Meeting the Demands of nanotechnology.
4. Carbon-Based nanostructures.
5. Quantum Confinement Structures.
6. Hydroxyapatite Bioceramics.
7. Other Examples of Plasma-Aided Nanofabrication.
8. Further Examples, Conclusions, and Outlook.
References.
Index.
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