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Nanoscale Calibration Standards and Methods

Gunter Wilkening, Ludger Koenders

ISBN: 978-3-527-60687-0

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541 pages

May 2006

US $239.99

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1 INSTRUMENTATION
- Long-range Scanning Probe Microscopes
- Development of SPM and Sensors
2 CALIBRATION
- Standards for Nanometrology
- Tip shape
- Optical Methods
3 APPLICATION
- Lateral Structures
- Surfaces
- Material Properties

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