|
E-book
Microsystem TechnologyISBN: 978-3-527-61301-4
E-book
512 pages
July 2008
This price is valid for United States. Change location to view local pricing and availability. ![]() |
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.



