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Resonant MEMS: Fundamentals, Implementation, and Application

Oliver Brand (Editor), Isabelle Dufour (Editor), Stephen Heinrich (Editor), Fabien Josse (Editor), Gary K. Fedder (Series Editor), Christofer Hierold (Series Editor), Jan G. Korvink (Series Editor), Osamu Tabata (Series Editor)
ISBN: 978-3-527-67635-4
512 pages
April 2015
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Description

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

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Table of Contents

PART I. FUNDAMENTALS
Fundamental Theory of Resonant MEMS Devices
Frequency Response of Cantilever Beams Immersed in Viscous Fluids
Damping in Resonant MEMS
Parametrically-Excited Micro- and Nanosystems
Finite Element Modeling of Resonators

PART II. IMPLEMENTATION
Capacitive Devices
Piezoelectric Resonant MEMS
Resonant MEMS Electrothermal Excitation
Nanoelectromechanical Systems (NEMS)
Organic Resonant MEMS Devices
Devices with Embedded Channels
Hermetic Packaging for Resonant MEMS
Compensation, Tuning and Trimming of MEMS Resonators

PART III. APPLICATIONS
MEMS Inertial Sensors
Resonant MEMS Chemical Sensors
Biosensors
Fluid Properties Sensors
Energy Harvesting Devices
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Author Information

Oliver Brand is Professor of Bioengineering and Microelectronics/Microsystems at Georgia Institute of Technology, Atlanta, USA. He received his diploma degree in Physics from Technical University Karlsruhe, Germany, in 1990, and his PhD from ETH Zurich, Switzerland, in 1994. Between 1995 and 2002, he held research and teaching positions at the Georgia Institute of Technology (1995-1997) and ETH Zurich (1997-2002). Oliver Brand's research interest lies in the areas of CMOS-based micro- and nanosystems, MEMS fabrication technologies, and microsystem packaging.

Isabelle Dufour is Professor of Electrical Engineering at the University of Bordeaux, France. She received the PhD and habilitation degrees in Engineering Sciences from the University of Paris-Sud, Orsay, France, in 1993 and 2000, respectively. Isabelle Dufour was a CNRS research fellow from 1994 to 2007, first in Cachan working on the modeling of electrostatic actuators such as micromotors and micropumps and after 2000 in Bordeaux working on microcantilever-based chemical sensors. Her research interests are mainly in the areas of sensors for chemical detection, rheological measurements and materials characterization.

Stephen M. Heinrich is Professor of Civil Engineering at Marquette University, Wisconsin, USA. He earned his MSc and PhD degrees from the University of Illinois after which he joined the faculty at Marquette University. Stephen Heinrich's research is focused on structural mechanics applications in microelectronics packaging and the development of new analytical models for predicting and enhancing the performance of cantilever-based chemical sensors. The work performed by Stephen Heinrich and his colleagues has resulted in over 100 publications and presentations and three best-paper awards from IEEE and ASME.

Fabien Josse is Professor in the Department of Electrical and Computer Engineering and the Department of Biomedical Engineering at Marquette University, Wisconsin, USA. He received the MSc and PhD degrees in Electrical Engineering from the University of Maine, and belongs to the Marquette University faculty since 1982. His research interests include solid state sensors, acoustic wave sensors and MEMS devices for liquid-phase biochemical sensor applications, investigation of novel sensor platforms, and smart sensor systems.
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