Introduction to Microsystem Technology:
A Guide for Students
March 2008
Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunities of microelectronics to non-electronic systems, its number of application fields continues to increase. Microsensors are one of the most important fields, used in medical applications and micromechanics. Microfluidic systems are also a significant area, most commonly used in ink-jet printer heads.
This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, Introduction to Microsystem Technology covers the following:
- microsystem materials (including silicon, polymers and thin films), and the scaling effects of going micro;
- fabrication techniques based on different material properties, descriptions of their limitations and functional and shape elements produced by these techniques;
- sensors and actuators based on elements such as mechanical, fluidic, and thermal (yaw rate sensor components are described);
- the influence of technology parameters on microsystem properties, examining, for example, the robust and safe operation of a microsystem device.
The book presents problems at the end of each chapter so that you may test your understanding of the key concepts ( full solutions for these are given on this accompanying website). Practical examples are included also, as well as case studies that enable a better understanding of the technology as a whole. With its extensive treatment on the fundamentals of microsystems, this book also serves as a compendium for engineers and technicians working with the technology.