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Mechanics of Microsystems

Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi, Stefano Mariani

Micro- and Nanomanipulation Tools

Yu Sun, Xinyu Liu, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata

Resonant MEMS: Fundamentals, Implementation, and Application

Oliver Brand, Isabelle Dufour, Stephen Heinrich, Fabien Josse, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata

Micro Energy Harvesting

Danick Briand, Eric Yeatman, Shad Roundy, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata

Reliability of MEMS: Testing of Materials and Devices

Osamu Tabata, Toshiyuki Tsuchiya, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink
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