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Spectroscopic Ellipsometry and Reflectometry: A User's Guide




Spectroscopic Ellipsometry and Reflectometry: A User's Guide

Harland G. Tompkins, William A. McGahan

ISBN: 978-0-471-18172-9 April 1999 248 Pages


While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
Perspective and History.


Optical Properties of Materials and Layered Structures.


The Anatomy of a Reflectance Spectrum.

Aspects of Single-Wavelength Ellipsometry.

The Anatomy of an Ellipsometric Spectrum.

Analytical Methods and Approach.

Optical Data Analysis.

Quality Assurance.

Very Thin Films.