Gas Release from Solids.
Residual Gas Analyzers.
Interpretation of RGA Data.
Getter and Ion Pumps.
Materials in Vacuum.
Joints, Seals, and Valves.
Rough Vacuum Pumping.
High Vacuum Systems.
Ultraclean Vacuum Systems.
High Flow Systems.
Appendix A. Units and Constants.
Appendix B. Gas Properties.
Appendix C. Material Properties.
Appendix D. Isotopic Abundances.
Appendix E. Cracking Patterns.
Appendix F. Pump Fluid Properties.
"...clearly written with...many helpful hints...highly recommended." (MRS Bulletin, January 2005)
"This book sucks in a good way…the third edition will never get dusty on my bookshelf…although the text is certainly not coffee-table reading material, it will have a wide appeal…it is particularly valuable as a reference for those who work practically with vacuum technologies and a must-buy for those who design them." (JOM, February 26, 2004)
"...a fundamental understanding of modern vacuum technology and a practical user's perspective of laboratory and industrial vacuum technology. This edition, while still providing core information in a very practical style...covers many new advances in the field...there are loads of graphs, data, and tables to provide practical and useful information to the vacuum user." (IEEE Electrical Insulation Magazine)