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CMOS - MEMS

Henry Baltes (Editor), Oliver Brand (Editor), Gary K. Fedder (Editor), Christofer Hierold (Editor), Jan G. Korvink (Editor), Osamu Tabata (Editor)

ISBN: 978-3-527-33499-5

Jul 2014

608 pages

In Stock

$97.95

Description

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of
MEMS is covered from all angles.

The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first
place, rather than having a hybrid solution.
PREFACE

FABRICATION TECHNOLOGY

MATERIAL CHARACTERIZATION

MONOLITHICALLY INTEGRATED INERTIAL SENSORS

CMOS?MEMS ACOUSTIC DEVICES

RF CMOS MEMS

CMOS-BASED PRESSURE SENSORS

CMOS-BASED CHEMICAL SENSORS

BIOMETRIC CAPACITIVE CMOS FINGERPRINT SENSOR SYSTEMS

CMOS-BASED BIOCHEMICAL SENSING SYSTEMS

CMOS-BASED THERMAL SENSORS

CIRCUIT AND SYSTEM INTEGRATION

SUBJECT INDEX