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CVD of Compound Semiconductors: Precursor Synthesis, Developmeny and Applications

CVD of Compound Semiconductors: Precursor Synthesis, Developmeny and Applications

Anthony C. Jones, Paul O'Brien

ISBN: 978-3-527-61462-2

Nov 2008

352 pages

Select type: E-Book

$188.99

Description

Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for semiconductor deposition and the materials properties that make the organometallic precursors useful in the electronics industry are discussed for a variety of materials.

Topics included:

* techniques for compound semiconductor growth
* metalorganic precursors for III-V MOVPE
* metalorganic precursors for II-VI MOVPE
* single-source precursors
* chemical beam epitaxy
* atomic layer epitaxy

Several useful appendixes and a critically selected, up-to-date list of references round off this practical handbook for materials scientists, solid-state and organometallic chemists, and engineers.
Basic Electronics
Introduction to Vapor-Phase Epitaxy
MOCVD
ALE
CBE
Precursor Chemistry
General Classes
Synthesis/Purification
Effects of Trace Impurities on Layer Properties
Deposition of III-V Semiconductors
MOCVD
ALE
CBE
Deposition of II-VI Semiconductors
MOCVD
ALE
Future Prospects