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Diamond Semiconductor Devices and Physics

Diamond Semiconductor Devices and Physics

Yasuo Koide

ISBN: 978-3-527-34430-7

Aug 2019

320 pages

Select type: Hardcover

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Description

The book describes the current state-of-the-art of diamond electronic and optical devices such as diamond MOSFETs, heterojunction FETs, MEMS, and deep-UV sensors, including preparation and processing methods of the underlying materials for each application area as well as information on the integration into existing semiconductor industry technologies. A chapter on carrier transport in diamond materials provides the background for understanding the device physics.
Preface
CARRIER TRANSPORT IN DIAMOND
Bulk transport
Surface transport
Conclusion
SCHOTTKY AND OHMIC CONTACTS
Introduction
Schottky contact
Ohmic contact
Contact resistance
Conclusions
IDEAL MOS STRUCTURES AND INTERFACES
Introduction
Ideal MOS structures and dielectrics
Interface states
Conclusions
DIAMOND MOSFETS
Introduction
MOS capacitors and MOSFETs
Vth control and mechanisms
Logic circuits
Conclusions
DIAMOND HETEROJUNTION FETS (HFETS)
Introduction
AlN growth by MOVPE and sputter deposition techniques
HFETs using AlN
Transport mechanism
Conclusions
DIAMOND MEMS
Introduction
Fabrication processing
NEMS/MEMS
Resonant frequency and quality factor
Conclusions
DIAMOND DEEP-UV AND RADIATION SENSORS
Introduction
Schottky photodiode
MSM conductor sensor
Schottky-MSM sensor
Sensing mechanism
Frame sensing
Conclusions
SUMMARY