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EUV Lithography



EUV Lithography

Vivek Bakshi

ISBN: 978-0-470-47155-5 December 2008 702 Pages


EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.