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Enabling Technology for MEMS and Nanodevices: Advanced Micro and Nanosystems

Enabling Technology for MEMS and Nanodevices: Advanced Micro and Nanosystems

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Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps.

Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored.

This new series, Advanced Micro & Nanosystems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.
M3: The Third Dimension of Silicon
Trends in MEMS Commercialization
Capacitive Interfaces for MEMS
Packaging of Advanced Micro- and Nanosystems
High Frequency Integrated Micro-electromechanical Resonators and Filters
MEMS in Mass Storage Systems
Scanning Micro- and Nanoprobes for Electrochemical Imaging
Nanofluidic Simulations
Nanofluidics -
Structures and Devices
Carbon Nanotubes and Sensors: a Review
CMOS-based DNA Sensor Arrays
"Overall, the book gives good insight into very recent technologies, developments, and practical applications in the MEMS field. I would recommend this book as supplementary reading for graduate students, but not as a class text since the book assumes the reader already has fundamental knowledge in this research field. The book is also a very useful source for professionals in related areas of materials science and mechanical and chemical engineering who want to become aware of emerging MEMS technologies."
Advanced Materials

"... an excellent book that gives a good overview and discussion of sensors and devices commonly found in the field of MEMS as well as more advanced devices..."
MRS Bulletin