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Handbook of Semiconductor Technology, Volume 2: Processing of Semiconductors

Handbook of Semiconductor Technology, Volume 2: Processing of Semiconductors

Kenneth A. Jackson (Editor), Wolfgang Schröter (Editor)

ISBN: 978-3-527-62182-8

May 2008

715 pages

Select type: O-Book

Description

In this self-contained handbook deals on the enabling materials technology for the electronics industry world-renowned authors treat the processing of semiconductors and related technologies.

Silicon Processing
Compound Semiconductor Processing
Epitaxial Growth
Photolitography
Doping
Etching Processes in Semiconductor Manufacturing
Silicon Device Structures
Compound Semicondutor Device Structures
Silicon Device Processing
Compound Semiconductor Device Processing
Integrated Circuit Packaging
Interconnect Systems