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LIGA and its Applications

LIGA and its Applications

Volker Saile (Editor), Ulrike Wallrabe (Editor), Osamu Tabata (Editor), Jan G. Korvink (Editor), Oliver Brand (Series Editor), Gary K. Fedder (Series Editor), Christofer Hierold (Series Editor)

ISBN: 978-3-527-31698-4

Jan 2009

490 pages

In Stock



Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets, commercialization opportunities and aspects of mass or large-scale production as well as design tools, experimental techniques, novel materials, and ideas for future improvements. Not only do they weigh up cost versus quantity, they also consider CMOS and LIGA strategies.
Of interest to physicists, electronics engineers, materials scientists, institutional and industrial libraries as well as graduate students of the relevant disciplines.

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I. Technologies
Innovative exposure techniques for 3-D microfabrication
Large Surface Area Techniques
PTFE photo-fabrication by SR (TIEGA process)
Photomask Technologies
Photomask Comparisons
Galvanics and Molding
Simulating New LIGA Processes
Commercial Simulation Program
Simulation Tools for Design
Design for Assembly and Safe Manufacturing
II. Applications
Market Analysis and Commercialization of LIGA
Optical MEMS and Polymer Optics
RF Applications
Evolution of the Spectrometer
Microfluidics in Biotechnology
MEMS (actuators)
Microfluidics for Biochip Applications
Ultrasonic Transducers
Swiss Luxury Watches Using MEMS Components
III. Outlook
Extreme Nanostructuring
Novel Resist Systems
Hard Gold
Interferential X-ray Lithography
Table-top Synchrotrons for Future Light Sources and their Application in Microfabrication