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Micro-Manufacturing: Design and Manufacturing of Micro-Products

Micro-Manufacturing: Design and Manufacturing of Micro-Products

Muammer Koc (Editor), Tugrul Özel (Editor)

ISBN: 978-0-470-55644-3

May 2011

404 pages

In Stock

$140.00

Description

This book is the first of its kind to collectively address design-based and mechanical micro-manufacturing topics in one place.  It focuses on design and materials selection, as well as the manufacturing of micro-products using mechanical-based micro-manufacturing process technologies.  After addressing the fundamentals and non-metallic-based micro-manufacturing processes in the semiconductor industry, it goes on to address specific metallic-based micro-manufacturing processes, such as: micro-forming, micro-machining, micro-molding, micro-laser processing, micro-layered manufacturing, micro-joining, micro-assembly and materials handling, and microEDM and ECM. The book provides an in-depth understanding of materials behavior at micro-scales and under different micro-scale processing conditions, while also including a wide variety of emerging micro-scale manufacturing issues and examples.
FOREWORD.

CONTRIBUTORS.

1 FUNDAMENTALS OF MICRO-MANUFACTURING.

2 MICRO-FABRICATION PROCESSES IN SEMICONDUCTOR INDUSTRY.

3 MODELING AND ANALYSIS AT MICRO-SCALES.

4 METROLOGY, INSPECTION, AND PROCESS CONTROL IN MICRO-SCALES.

5 MICRO-LAYERED MANUFACTURING.

6 MICRO-LASER PROCESSING.

7 POLYMER MICRO-MOLDING/FORMING PROCESSES.

8 MECHANICAL MICRO-MACHINING.

9 MICRO-FORMING.

10 MICRO-ELECTRO DISCHARGE MACHINING (μEDM).

11 METAL INJECTION MOLDING AT MICRO-SCALES (μMIM).

INDEX.