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Mechanics of Microsystems

Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi, Stefano Mariani

Fluid Properties at Nano/Meso Scale: A Numerical Treatment

Peter Dyson, Rajesh Ransing, Paul H Williams, Rhondri Williams

Introduction to Microsystem Technology: A Guide for Students

Gerald Gerlach, Wolfram Dotzel, Dörte Müller
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