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Nano Electro Mechanical Systems: Downscaling Resonant Sensors

Nano Electro Mechanical Systems: Downscaling Resonant Sensors

Sébastien Hentz

ISBN: 978-1-848-21631-0

Sep 2016, Wiley-ISTE

Select type: Hardcover


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Beginning with an introduction that outlines the primary motivations towards downscaling microelectromechanical systems (MEMS) sensors, and the issues that research faces when doing so, the authors of this title then present nano-resonators and describe their first implementation in the field of inertial sensing, along with the associated shortcomings. The following chapter shows how research has solved the initial issues with adapted transduction for resonators on the nanoscale and in which application fields it has done so. The next chapter focuses on mass spectrometry with nanoelectromechanical systems (NEMS) and their ultimate mass sensing performance, before expanding on how NEMS will be scaled up for real-life purposes.