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Plasma-Aided Nanofabrication: From Plasma Sources to Nanoassembly



Plasma-Aided Nanofabrication: From Plasma Sources to Nanoassembly

Ken Ostrikov, Shuyan Xu

ISBN: 978-3-527-61156-0 September 2007 315 Pages


In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.
1 Introduction
2 What Makes Low-Temperature Plasmas a Versatile Nanotool?
3 Specific Examples and Practical Framework
4 Generation of Building andWorking Units
5 Transport, Manipulation, and Deposition of Building and Working Units
6 Surface Science of Plasma-Exposed Surfaces and Self-Organization Processes
7 Ion-Focusing Nanoscale Objects
8 Building and Working Units at Work: Applications in Nanoscale Materials Synthesis and Processing
9 Conclusions and Outlook
10 Appendix A. Reactions and Rate Coefficients in Low-Temperature PECVD of Carbon Nanostructures
11 Appendix B. Why plasma-based nanoassembly: many more reasons
"The authors have managed to write a very informative and inspiring book about a fascinating topic of advanced plasma science and materials processing." (Macromol. Chem. Phys., 2008, 209)